APS30 Low Pressure, Inert Media
The APS30 is a high performance, micromachined silicon pressure sensor. This silicon pressure transducer was designed for demanding industrial and commercial applications. The pressure port on the bottom of the MEMS sensor is highly resistant to chemicals. The alumina ceramic (AL2O3) packaging provides mechanical isolation which reduces stress affects. Isolation of the mechanical stresses on the sensing element contributes to the long term stability of the sensor. Custom pressures and packaging is available to OEM customers and compliant with ITAR (International Traffic in Arms Regulations).
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High Stability, Low Cost
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Backside Pressure for Harsh Environment
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Absolute or Gage
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Constant Current or Voltage Excitation
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Uncompensated Millivolt Output
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5-300 psi pressure ranges
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Media – Liquid, Air, & Gas
